RENA Compass Spin Rinse Dryers (SRD) provide state-of-the-art cleaning, rinsing, and drying of wafers after wet processing, for chemical or residue removal for high and low-profile cassettes. Compass SRDs are designed to reduce operating costs while meeting and exceeding cleanliness, dryness, and particle performance specifications. Utilizing DI water rinse followed by N2 drying, the Compass SRD's non-contact heating results in cleaner N2 because a filter is positioned after the heater to eliminate direct contact between the N2 and heater.
SPIN. RINSE. DRY. With Confidence.
IDX Flexware provides advanced process control features, that can only be found on RENA's Compass SRD. With greater reliability, performance, and low operating costs coupled with RENA's award-winning support, the Compass Spin Rinse Dryer is the wafer drying solution you can trust.
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Compass Benchtop
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Compass Stand-Alone
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Compass Dual Stand-Alone
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