MEI Wet Processing Wins Major BEOL Semiconductor Equipment Sale

MEI beats competition with superior Polymer removal Performance in BEOL Metal Clean Equipment Sale to Major Semiconductor Firm

 

ALBANY, Ore.—MEI Wet Processing Systems and Services LLC (MEI), has finalized the sale of a BEOL (Back End of the Line) Side Wall Polymer clean system for a Tier 1 device manufacturer in the North Eastern Region of the United States. The MEI Evolution fully automated wet bench will be using the customers proprietary chemical mixture to clean aluminum (Al) interconnects, metal lines and via holes @ >180nm with > 4:1 aspect ratio. In demonstrated performance, MEI’s solution provided better polymer cleaning performance with lower post process corrosion, greater uniformity performance, and better software usability and flexibility. In addition, MEI’s strong field service and support played a role in achieving this significant win.

 

“This Evolution Wet Processing system has been specifically designed for this customers proprietary clean chemistry. We configured the system for high throughput by integrating dual Genesis X dryers,” noted Dan Cappello, CEO of MEI Wet Processing, “The system utilizes precise process controls driven by our proprietary IDX software. This is one more example of how MEI is leveraging our application and engineering experience to provide customized solutions for leading device manufacturers “