MEI’s Compass Spin Rinse Dryer Introduces New Advanced Features!
July 13th, 2015
ALBANY, Ore.—July 13, 2015—MEI, LLC has made a breakthrough in the design of a new spin rinse dryer (SRD) for semiconductor
processing that significantly reduces the cost of operations by lowering Nitrogen (N2 ) use.
The proprietary design of the SRD enables rapid drying of semiconductor wafers with very low particle performance.
MEI’s Compass SRD ships with MEI’s IDX Flexware™ Process Control Software, enabling host communication and factory automation. With recipe download and remote access, the Compass Spin Rinse Dryer increases ease of use and process control. The advanced process controls in the Compass SRD also allow capture of process data for robust line analysis.
“By using the MEI Compass SRD, manufacturers will reduce their costs and increase yield while having more process control and information,” said Ed Jean, Worldwide Sale Manager, MEI Wet Processing Systems. “With the Compass SRD, we have introduced a wealth of features that improve process control, reduce particles, enable factory automation with host communication, and importantly, reduce operating costs, especially the use of nitrogen, which is a huge expense.”
The MEI Compass SRD combines MEI’s expertise in batch semiconductor processing and SECS GEM process control software. The result is less contamination, ease of maintenance, and a design specially to reduce operating costs. With the cost of Nitrogen rising, the Compass SRD can reduce operating costs considerably.
Another unique benefit of working with MEI is software expertise. IDX, the company’s proprietary control software, mines process data from the Compass SRD. This allows engineers visibility into what is occurring in the chamber.
Price and availability
The Compass SRD is available for purchase immediately. For more information about the Compass Spin Rinse Dryer please contact MEI at (503) 568-9286 or email Ed Jean at ed.jean@rena-na.com.
About MEI LLC
Founded in 1990 and based in Albany, Oregon, MEI is a diversified manufacturing and service company serving the solar, semiconductor, and high technology industries. The company’s specialties include automated and semi-automated process systems and services; linear and rotary wet benches for the MEMs and semiconductor industries; automated chemical delivery systems; and process control software. MEI’s products integrate cleanroom safety, ergonomics, and support equipment with unparalleled ease of use and ease of maintenance. MEI has built its reputation on a commitment to outstanding customer service. For more information about MEI, visit www.rena-na.com.