Major Equipment Manufacturer selects MEI’s SRD

Major, European Equipment Manufacturer selects MEI’s Compass SRD

August 8, 2017 – Albany Oregon – MEI has shipped a double standalone 200mm Compass Spin Rinse Dryer to an equipment
manufacturer in Germany. MEI’s Compass SRD will integrate into the customer’s fully automated wet processing system.  The Compass SRD was selected for its proven host software SECs/GEM communication package and flexible controller interface and packaging.  MEI’s proven IDX Flexware^TM Software provides a proven Data Logging Package that is superior to any other SRD on the market.  No more process data “black holes” and not knowing if lots were actually run through your SRDs. The Compass SRD’s rotor is designed to be automation compatible giving the system robot the clearances needed to safely and reliably insert and remove the cassette from the SRD chamber. The dryer’s N2 and blanket heaters are programmable with idle and process set points.  This gives the customer the ability to control bowl temperature for wafers/substrates that are temperature sensitive.  Our DC Brushless Servo motor is capable of 0 to 2800 rpms and holding rpm set point to ±2 rpm.  No other SRD on market can perform at this rpm range and accuracy.  Additionally, the Compass’ proprietary design uses about 50% less N2 compared to other SRD’s on market.

The Compass Spin Rinse Dryer is available in the following formats:

• Low Profile Cassette Chambers
• High Profile Cassette Chambers
• Bench Top Single Chamber
• Single Chamber Standalone
• Double Chamber Standalone

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Our goal is to provide our customers with a state of the art product that combines modern technology,
a reduced cost of ownership with affordable pricing.