MEI GENESIS DRYER SELECTED BY MAJOR DEFENSE IC SUPPLIER FOR CRITICAL DRY PROCESSING

MEI Wet Processing received an order, from an existing domestic customer, for a Standalone Marangoni dryer system.

MEI’s Genesis Dryer was selected due to our superior process performance. The customer required a final surface condition on a fragile substrate which was not possible using Spin Rinse Dryers. Genesis Dryer performance is driven by our attention to design detail, resulting in a drying system that produces cutting edge particle performance with faster cycle time and stationary wafers. Several design elements, unique to the Genesis Dryer, make this possible by combining the best ideas from a variety of dryers that were developed over the last 20 years. MEI modernized the technology through mechanical design, component selection, and sophisticated software control.  We’ve recognized that customers developing new products using the latest EPI materials and methods of IC construction, were experiencing incompatibilities with spin rinse dryers. These thinner substrates are on the rise and incompatible with spin dryers. In addition, the denser device designs require that a more critical surface condition be maintained.

MEI provides field process data which clearly demonstrates the excellent particle performance capability of the Genesis Dryer. This performance was just the edge required to win this order. Process guarantees combined with MEI’s sophisticated designs and IDX software capabilities offer a clear advantage over lower cost suppliers. The MEI Genesis Dryer is well suited for critical drying of surface prep applications.   

As semiconductor manufacturers expand their product offerings into new materials and methods of IC design and construction, we expect to see a sharp rise in the need for standalone Marangoni Dryers. MEI is well positioned to take advantage of this trend and offers the most advanced dryer design with the most sophisticated software control available on the market today. Visit our website for more information about the MEI Genesis Standalone Marangoni Dryer System.